Silicon Material Processing Specifications::8 inch / 12 inch
Silicon Material Processing Length:≤450mm
Maximum Line Speed:30m/s
Main Wire Diameter:≥φ0.05mm
TTV:≤10μm (ADE7200)
Bow:≤±10μm (ADE7200)
Average Warp:<12μm
Yield Rate:≥97%
Wire Breakage Rate:≤1%(Excluding Non-Equipment Factors)
Equipment Dimensions:4460x2360x3390mm
Rated Total Power of Equipment:188kW
Equipment Weight:15.6t
"CTRTHK" "UMTR"
"CLASSNUM" "#" "MAX" "MIN" "MEAN" "DELTA" "MAX_DEV" "STD_DEV" "CV"Total 60 752.54 741.25 746.69 11.29 5.842 1.589 0.213
"BOW3P" "UMTR"
"CLASSNUM" "#" "MAX" "MIN" "MEAN" "DELTA" "MAX_DEV" "STD_DEV" "CV"Total 60 7.16 -0.75 2.34 7.91 4.817 2.082 88.868
"WARP3P" "UMTR"
"CLASSNUM" "#" "MAX" "MIN" "MEAN" "DELTA" "MAX_DEV" "STD_DEV" "CV" Total 60 15.92 6.79 9.70 9.13 6.226 1.635 16.861
"TTV" "UMTR"
"CLASSNUM" "#" "MAX" "MIN" "MEAN" "DELTA" "MAX_DEV" "STD_DEV" "CV"Total 60 9.07 2.43 4.66 6.64 4.405 1.852 39.715
1. The tension sensor has a range of 30N for higher control precision;
2. Auxiliary slurry pipe patent technology, independent control of main and auxiliary flow rates;
3. Low-inertia lightweight integrated turnover wheel for convenient assembly structure replacement;
4. The system adopts Germany-imported Siemens motion control system and motors;
5. Excellent control of silicon wafer surface quality indicators such as TTV, wire marks, and warpage;
6. Compatible with automatic stick-attach equipment, with a bottom surface in the form of NTC;
7. The equipment is specially designed and manufactured for semiconductor wafer processing, not a photovoltaic conversion machine;
8. Front-end loading method for convenient operation, capable of upgrading to automatic loading conditions;
9. The tension arm has a small weight and overhang, with a wire angle close to 90°, beneficial for wire control;
10. Vertical feed employs a cast-in 4-rail mechanism to reduce TTV at the knife entrance;
11. The wire-receiving system is located on both sides of the equipment, installed on an integral cast base for stable structure;
12. The main spindle adopts angular contact bearings and oil-gas lubrication structure, with cooling supplied by a separate water tank;
13. The equipment base, main spindle box support, wire feed, and wire-receiving bracket are all cast as a unified structure.